New AttoMap software enables 3D mapping of spectroscopic properties at the nanoscale
The new AttoMap software, based on Digital Surf's Mountains technology, now allows 3D image of spectroscopic information obtained with Attolight's Cathodoluminescence (CL) technology. Attolight's CL technology integrates a scanning electron microscope and optical microscope into its high-resolution spectroscopic instruments. These are used by global players to characterize semiconductors, solar cells and other nano devices. For researchers and quality engineers, AttoMap's 3D visualization facilitates the location and characterization of structures and defects on these devices, but also on other objects at the nanoscale.
The Attolight CL microscope generates images containing up to 1600 colors. Visualizing these images, called hyperspectral maps, is a real challenge because the human eye can only perceive the three primary colors, red, green and blue as well as a mixture of these colors.
AttoMap software provides a very powerful solution to this problem. First, it allows the user to convert the relevant spectral bands into colors that he can perceive, such as red, green and blue. The software then automatically generates a 2D image in RVB that respects the capabilities of the human eye and helps the user locate the location of specific spectral characteristics. Finally, AttoMap transforms this image into a 3D map, in which the third dimension represents the intensity of cathodoluminescence. This is a very practical method to compare the intensity of each spectral band with the other bands. This 3D map can be modified in real time to make inspection easier.
In addition to processing cathodoluminescence data, AttoMap works with images and surface data from a wide range of microscopes. These include scanning electron microscopes (MEBs), near field microscopes (PMS) and 3D optical profileometers. AttoMap CL software is capable of co-locating images and data from different instruments to carry out correlative studies. By working with 3D topographic surface data, measured or reconstructed, it can be used for surface state metrology applications. These include the calculation of areas, volumes, pitch heights and roughness parameters, but also Fourier's analysis, particle analysis, statistical analyses and much more.
"3D visualization of AttoMap hyperspectral images is an incredible way to quickly gain understanding of a cathodoluminescence dataset. This further widens the gap between Attolight and its competitors by providing superior experience, from measurement to data processing,said Jean Berney, Technical Director of Attolight. In addition, the software provides unprecedented analytical tools to correlate cathodoluminescence with complementary measurement methods such as EBIC, AFM, micro-photoluminescence or Raman. »
"Attolight is a benchmark in cathodoluminescence technology. Digital Surf is proud to provide AttoMap software from its Mountains Technology® software platform, which includes a wide range of functions for imaging, hyperspectral analysis and surface metrology," said François Blateyron, Digital Surf's Chief Operating Officer.
Attolight will unveil AttoMap at the MRS trade show in Boston, Massachusetts, December 2-4, 2014.
Find out more: www.attolight.com